Precision Semiconductor Parameter Analyzer
•Four built-in high-resolution source /monitor units (HRSMUs), two voltage source units (VSUs), and two voltage monitor units (VMUs).
•Develops new process technologies and evaluates materials with measurements to 1 fA and 0.2 uV.
•Full Kelvin; force, sense, and guard terminals for each HRSMU
•Performs quasi-static capacitance measurements versus voltage measurements
•Automatically extracts process parameters without manually manipulating screen markers
•Measures leakage characteristics with ultra-low leakage SMUs
•Automates device characterization with integrated pulse generators and selector switches
•Performs on-wafer reliability tests with built-in stressing modes
•Performs point-and-click measurements with graphical user interface
•Provides graphical data analysis capabilities with a Windows environment
•Knob sweep function quickly verifies each probe is making proper contact
•Stand-by mode eliminates the need for external power supplies
•Triggering modes allow synchronized AC/DC measurements
•IBASIC user functions allow data to be plotted and analyzed